1. Product overview: Phosphine compressor is specially used for pressurized transportation of highly toxic self-ignition pH gas, mostly used in semiconductor and LED chip epitaxial processes. The medium is highly toxic and spontaneously ignites when it meets air. The equipment adopts an oil-free structure with closed nitrogen protection, and the whole process is isolated from air to ensure process safety.

2, performance characteristics:

Fully enclosed inert protection: the main engine cavity is continuously purged with positive nitrogen pressure to prevent air from entering and causing spontaneous combustion; Real-time monitoring of trace phosphazene by leak sensor.

Anti-decomposition and anti-blocking: low-temperature interstage cooling inhibits thermal decomposition of phosphorus alkane, and high-precision prefilter is used to intercept and decompose solid phosphorus dust.

Anti-corrosion special alloy: Hastelloy is used for the over-current parts to resist the corrosion of the cylinder block and valve plate by-products from the decomposition of phosphane.

One-key replacement procedure: stop the machine and automatically purge the residual phosphane in the cylinder with nitrogen, so that the equipment maintenance has zero poisoning risk.

3. Application scope: epitaxial growth of LED chips, third-generation semiconductor wafer manufacturing, integrated circuit doping process, and production of special optoelectronic devices.

Support processing customization, attributes are for reference only, please consult the manufacturer for details!