1. Product Overview: Silane compressor is a special pressurization equipment for semiconductor hazardous technology. SiH₄ is highly toxic in spontaneous combustion and explodes immediately when it meets air. The whole machine adopts an all-inert gas isolation and sealing, oil-free explosion-proof structure to provide safe and stable silane gas source pressurization for chip deposition and photovoltaic coating.

2, performance characteristics:

Extreme explosion-proof and flame-retardant: the whole machine is isolated by inert nitrogen to protect the cavity, and the shaft seal is continuously purged with nitrogen to prevent silane from spontaneous combustion in contact with air; Electronically controlled intrinsically safe and explosion-proof.

Anti-decomposition temperature control: multi-stage low-temperature cooling, strictly control the exhaust temperature below the critical value of silane thermal decomposition to avoid powder deposition in the cylinder.

Fully passivated material: all flow parts are electrolytically passivated, and there is no catalytic surface to prevent silane from decomposing in advance to produce silicon powder to block the valve block.

Multi-interlock protection: triple interlock of oxygen content, temperature and pressure, and a small amount of air permeates into the nitrogen replacement cavity of automatic shutdown.

3. Application scope: PECVD coating of photovoltaic cells, epitaxial deposition of semiconductor chips, manufacturing of liquid crystal panels, vapor deposition of special ceramics, and coating technology of electronic components.

Support processing customization, attributes are for reference only, please consult the manufacturer for details!